Applications of RobotScope

1. Robot and EFEM Diagnostic Tool

RobotScope measures robot performance and verifies against standard. A list of scripted commands runs the robot through its critical functions. Each commandís result and response time must be within expected tolerances. The diagnostic test cycle runs automatically, and may take a few seconds, or an hour for different types robots or tasks.

If the machine's performance is within spec, then RobotScope confirms positively (Green Light). Each test report with detailed readings can be archived on disk.

If any parameter is out of spec, then RobotScope identifies it in Red. Each violation detail is highlighted individually. This pinpoint focus isolates the problem quickly and specifically.

To catch intermittent problems, the test is run overnight or for days. Any performance deviations are captured and recorded.

2. Testing Wafer AutoID Reader (bar code, OCR, etc) for Accuracy and Throughput

Several wafers with individual ID code marks are cycled through a wafer handler or EFEM. As the wafers pass the AutoID reader, each results code is monitored for repeatability.

As these cycles are repeated over a long time, positional variations or contamination can introduce variances. RobotScope records these variations and provides displays and analysis tools for rapid engineering characterization.

3. Robot Manufacturing, Burn-in Test

During burn-in test, RobotScope characterizes each robotís performance and saves an individualized test report. The pass/fail results are displayed on-screen. No additional time or test steps are required.

4. Systems Integration Test with New Components

When new components are substituted into a robot system or EFEM, the new configuration must be tested. RobotScope automates the tedious portion of this process.

The new systemís performance is tested and compared against the benchmark of the original. Any performance gaps or improvements are immediately visible and quantified.

5. Testing Wafer-Mapper Sensors

Intermittent wafer mapper failures are notoriously difficult to capture and diagnose. RobotScope tests mappers using a special map script. Wafers are transferred between container slots and then re-mapped in each position. The map is compared against previous results for repeatability. Any deviation from absolute repeatability is captured and recorded. The process can be run for long periods of time to build high confidence in mapper reliability. The hard test reports generated by RobotScope can be persuasive evidence for skeptical customers.

6. Testing Compatibility with New FOUP models

New FOUP models represent a risk. A seemingly minor difference can cause serious failures. RobotScope baselines handler performance with a known good FOUP model and then measures deviations from that standard with test models. This pinpoints areas of potential incompatibility.

7. Software Reliability Testing (memory leaks, etc)

Testing software reliability requires the precise replication of lengthy command sequences. RobotScope is ideally suited for this purpose. Some automation equipment pauses (hiccups) occasionally for internal maintenance such as garbage collection. Cycle testing with RobotScope will uncover behaviors of this sort.

8. Testing with New and Unusual Wafers

New wafer materials and processes are often run on old equipment that was designed only for old wafer types. This often causes new and unusual problems. RobotScope helps to build confidence, and to identify any problems that may be lurking.