Applications of RobotScope
1. Robot and EFEM Diagnostic Tool
RobotScope measures robot performance and verifies against standard. A list of scripted commands runs the robot through its critical functions. Each commandís result and response time must be within expected tolerances. The diagnostic test cycle runs automatically, and may take a few seconds, or an hour for different types robots or tasks.
If the machine's performance is within spec, then RobotScope confirms positively (Green Light). Each test report with detailed readings can be archived on disk.
If any parameter is out of spec, then RobotScope identifies it in Red. Each violation detail is highlighted individually. This pinpoint focus isolates the problem quickly and specifically.
To catch intermittent problems, the test is run overnight or for days. Any performance deviations are captured and recorded. 2. Testing Wafer AutoID Reader (bar code, OCR, etc) for Accuracy and Throughput
Several wafers with individual ID code marks are cycled through a wafer handler or EFEM. As the wafers pass the AutoID reader, each results code is monitored for repeatability.
As these cycles are repeated over a long time, positional variations or contamination can introduce variances. RobotScope records these variations and provides displays and analysis tools for rapid engineering characterization.
During burn-in test, RobotScope characterizes each robotís performance and saves an individualized test report. The pass/fail results are displayed on-screen. No additional time or test steps are required.
When new components are substituted into a robot system or EFEM, the new configuration must be tested. RobotScope automates the tedious portion of this process.
The new systemís performance is tested and compared against the benchmark of the original. Any performance gaps or improvements are immediately visible and quantified.